High temp furnace for fab lab

Sat, 27 Jun 2026 04:57:25 +0800

On the fab floor, soft bake and hard bake set the line—thermal control isn’t a knob you tweak, it’s the boundary condition. A 2°C swing across the wafer during bake shifts critical dimensions, and one particle in the chamber can kill a 300mm wafer. We built our high-temperature furnace for fab labs to live with those realities, not fight them. What matters, technically We spec temperature uniformity at ±0.1°C across the process zone, and we hold repeatability to that same tolerance, cycle after cycle. The hot zone uses quartz and short-wave infrared elements to deliver clean, fast heat with minimal thermal lag, so the ramp profile follows the recipe exactly. The chamber is engineered for cleanroom Class 1–100, with low-outgassing materials and a laminar flow path that keeps particle generation near zero. For photoresist bake, that translates to consistent solvent removal and polymer flow—no overbake, no underbake. Why it holds up in daily fab life You need thermal performance that doesn’t cost you uptime. This furnace runs 24/7, on a maintenance schedule you plan for, not surprise stoppages you chase. Every process recipe is stored with traceable parameters, so each bake is documented and repeatable. The same thermal platform handles multiple wafer sizes and batch configurations without requalifying the whole run, which shortens changeover and protects thermal budget. Energy is managed through fast stabilization and low standby losses—precision without wasted heat. What to get straight up front Installation means dedicated exhaust and a clean, dry gas supply matched to the tool’s interface specs. The furnace works with standard fab automation and SECS/GEM, but plugging it into your existing material-handling stack still needs coordinated validation around your specific wafer flow. Qualify it first against your critical photoresist bake stack. Once uniformity and particle performance are locked down, the furnace behaves like a fixed process constant, not a moving target.

Lab on Extra Performance IR Heating

High temp furnace for fab lab