http://ir-heat-extra.com/zh/tags/%E8%80%90%E7%94%A8%E7%9A%84/ Recent content in 耐用的 on Extra Performance IR Heating Hugo zh Sun, 07 Jun 2026 03:54:28 +0800 http://ir-heat-extra.com/zh/posts/durable-photoresist-bake-heater/ Sun, 07 Jun 2026 03:54:28 +0800 http://ir-heat-extra.com/zh/posts/durable-photoresist-bake-heater/ <p><img src="http://ir-heat-extra.com/images/e619a459508a95cd74ea4eae0be40cd1.png" alt="耐用型光刻胶烘烤加热器"></p> <p>在晶圆平台上，烘烤并非暂停——而是工艺锁定。如果光刻胶温度均匀性出现漂移，就会导致关键尺寸（CD）变化和良率问题。而当烘烤加热器开始性能下降时，数据会第一时间反映出来，远早于晶圆表现异常。</p>